Author:
Andò Bruno,Baglio S.,L’Episcopo G.,Trigona C.
Reference5 articles.
1. Han L, Chen S (2005) Wireless bimorph micro-actuators by pulsed laser heating. Sens Actuat A 121:35–43
2. Andò B, Baglio S, Savalli N, Trigona C (2011) Cascaded “triple bent beam” MEMS sensor for contactless temperature measurements in non accessible environments. IEEE Trans Instr Meas PP:1–10
3. Que L, Park JS, Gianchandani YB (1999) Bent-beam electro-thermal actuators for high force applications. In: MEMS’99, Twelfth IEEE international conference on MEMS, Orlando, FL, USA, 17–21 Jan 1999 pp 31–36
4. Chu LL, Que L, Gianchandani YB (2002) Measurements of material properties using differential capacitive strain sensors. J Microelectromech Syst 11:489–498
5. Andò B, Baglio S, Trigona C (2010) Autonomous sensors: from standard to advanced solutions. IEEE Mag Instr Meas 13(3):33–37