1. D. L. Tolliver, New needs in contamination control: A critical cornerstone in integrated circuit manufacturing, presented at the Fifth Annual Microelectronics Technical Symposium sponsored by Millipore Corporation, May 18, 1987, San Jose, California.
2. J. W. Mitchell, Chemical analysis of electronic gases and volatile reagents for device processing, “ Solid State Technol., p. 131, March 1985.
3. C. Murry, Improving gas handling safety, Semiconductor International, p. 60, August 1986.
4. L. Faure and H. Thebault, Perspectives on contamination control: Parts I and II, Microcontamination, p. 16, March and p. 10, April 1987.
5. D. W. Cooper, Particulate contamination and microelectronics manufacturing: An introduction,Aerosol Sci.Technol., 5,287–299 (1986).