1. Book of SEMI Standards, Gases Volume, 1997, Semiconductor Equipment and Materials International, 805 East Middlefield Road, Mountain View, CA 94043–4080.
2. Threshold Limit Values (TLVs ®) and Biological Exposure Indices (BEIs ®),1998 (rev.annually), American Conference of Governmental Industrial Hygienists, 1330 Kemper Meadow Drive, Cincinnati, 01–1 45240.
3. Code of Federal Regulations, Title 29 CFR (Occupational Safety and Health), Superintendent of Documents, U.S. Government Printing Office, Washington, DC 20402.
4. Code of Federal Regulations, Title 49 CFR Parts 100–199, (Transportation), Superintendent of Documents, U.S. Government Printing Office, Washington DC 20402.
5. Code of Federal Regulations, Title 40 CFR (Environmental Protection), Superintendent of Documents, U.S. Government Printing Office, Washington, DC 20402.