1. P. Tischer, “Electronics in Microelectronics,” W. A. Kaiser and W. E. Proebster, eds., North Holland, 1980.
2. B. J. Lin, “Microcircuit Engineering 81,” Swiss Federal Instit. Technol., Lausanne, Switzerland, 47 1981.
3. R. Hershel, SPIE Conference, Santa Clara, California, 1982.
4. M. C. King, “Principles of Optical Lithography,” Chapt. in VLSI Electronics Microstructure Sci., Vols. 1 and 2, ed. Einsbruch, Academic Press, 1981.
5. B. J. Lin, SPIE Proc. 174, 179.