1. L.I. Maissel and R. Glang (eds.), Handbook of Thin Film Technology, (McGraw-Hill, New York, 1970).
2. J.L. Vossen, G.L. Schnable, and W. Kern, J. Vac Sci. Technol. 11, 60 (1974).
3. J.L. Vossen and W. Kern (eds.), Thin Film Processes II, (Academic Press, New York, 1991).
4. S.M. Rossnagel, J.J. Cuomo, and W.D. Westwood (eds.), Handbook of Plasma Processing Technology, (Noyes Publications, New Jersey, 1989).
5. J.J. Cuomo, S.M. Rossnagel, and H.R. Kaufman (eds.), Handbook of Ion Beam Processing Technology, (Noyes Publications, New Jersey, 1989).