1. R. E. Howard and D. E. Prober, “Nanometer Scale Fabrication Techniques,” in: VLSI Electronics: Microstructure Science, Vol. V, N. E. Einspruch, ed., Academic, New York (1982).
2. J. E. Lukens, AIP Conf. Proc. 44:198 (1978); R. E. Howard, P. F. Liao, W. J. Skocpol, L. D. Jackel, and H. G. Craighead, Science 221:117 (1983).
3. H. I. Smith, Proc. IEEE 62:1361 (1974).
4. A. N. Broers, IEEE Trans. Electron Devices ED-28:1268 (1981).
5. R. Newman (ed.), “Fine Line Lithography,” North Holland Publ., Amsterdam (1980); I. Brodie and J. J. Muray, “Physics of Microfabrication,” Plenum Press, New York (1982); also, Refs. 1-3, 6-12 in Ref. 1.