Regularized model of post-touchdown configurations in electrostatic MEMS: bistability analysis
Author:
Funder
Division of Mathematical Sciences
Publisher
Springer Science and Business Media LLC
Subject
General Engineering,General Mathematics
Link
http://link.springer.com/content/pdf/10.1007/s10665-015-9820-z.pdf
Reference35 articles.
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2. Tas N, Sonnenberg T, Jansen H, Legtenberg R, Elwenspoek M (1996) Stiction in surface micromachining. J Micromech Microeng 6:385–397
3. Zhao Y-P, Wang LS, Yu TX (2003) Mechanics of adhesion in MEMS. J Adhesion Sci Technol 17(4):519–546
4. Guo Y, Pan Z, Ward MJ (2005) Touchdown and pull-in voltage behaviour of a MEMS device with varying dielectric properties. SIAM J Appl Math 66(1):309–338
5. Lin FH, Yang Y (2007) Nonlinear non-local elliptic equation modeling electrostatic actuation. Proc R Soc A 463:1323–1337
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