Author:
Choi Jongsoo,Shin Minchul,Rudy Ryan Q.,Kao Christopher,Pulskamp Jeffrey S.,Polcawich Ronald G.,Oldham Kenn R.
Funder
National Science Foundation
Publisher
Springer Science and Business Media LLC
Subject
Artificial Intelligence,Computer Science Applications
Reference60 articles.
1. Aktakka, E.E., Woo, J.K., Egert, D., Gordenker, R., Najafi, K.: A Vibratory Stage for on Chip Physical Stimulation and Calibration of MEMS Gyroscopes. IEEE ISISS, Laguna Beach (2014)
2. Ash, B.J., Stone, J., Roger, D.F., Schadler, L.S., Siegel, R.W., Benicewicz, B.C., Apple, T.: Investigations into the Thermal and Mechanical Behavior of PMMA/Alumina Nanocomposites. Proc. MRS, Boston (2001)
3. Baisch, A., Wood, R.: Design and fabrication of the Harvard ambulatory micro-robot. Robot. Res. 70, 715–730 (2011)
4. Baumeister, G., Mueller, K., Ruprecht, R., Hausselt, J.: Production of metallic high aspect ratio microstructures by microcasting. Microsyst. Technol. 8(2), 105–108 (2002)
5. Becker, H., Heim, U.: Hot embossing as a method for fabrication of polymer high aspect ratio structures. Sens. Actuators 83, 130–135 (2000)
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