Publisher
Springer Science and Business Media LLC
Subject
Artificial Intelligence,Computer Science Applications
Reference32 articles.
1. Al-Jodah, A., Shirinzadeh, B., Ghafarian, M., Das, T.K., Tian, Y., Zhang, D., Wang, F.: Development and control of a large range XYΘ micropositioning stage. Mechatronics 66, 102343 (2020)
2. Awtar, S., Parmar, G.: Design of a large range XY nanopositioning system. J. Mech. Robot. 5(2), 021008 (2013)
3. Cai, K., Tian, Y., Liu, X., Zhang, D., Shang, J., Shirinzadeh, B.: Development and control methodologies for 2-DOF micro/nano positioning stage with high out-of-plane payload capacity. Robot. Comput. Integr. Manuf. 56, 95–105 (2019)
4. Chao, P., Han, C., Zou, J., Zhang, G.: H [infinity] optimal inversion feedforward and robust feedback based 2d of control approach for high speed-precision positioning systems. J. Control Sci. Eng. 2016, 7256039 (2016)
5. Chen, M.Y., Huang, H.H., Hung, S.K.: A new design of a submicropositioner utilizing electromagnetic actuators and flexure mechanism. IEEE Trans. Ind. Electron. 57(1), 96–106 (2009)
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献