1. MEMS Research Center, Faculty of Engineering, University of Wisconsin. http://mems.engr.wisc.edu/MEMS.html (1999).
2. MEMS Exchange Corporation. http://www.mems-exchange.org/MEMS/ (1999).
3. Madou, M.J., Fundamentals of Microfabrication, Boca Raton and New York: CRC Press LLC. 1997, pp. 79–80.
4. Lim, J.S., Simulation of Scheduling Rules on MEMS Process, Bachelor Degree Thesis, Department of Mechanical Engineering, National University of Singapore, 1999.
5. Baker, K.R., Introduction to Sequencing and Scheduling, New York: John Wiley & Sons, 1974, pp. 1–3.