Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications
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Springer US
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http://link.springer.com/content/pdf/10.1007/0-387-25786-1_10.pdf
Reference26 articles.
1. Epstein, A.H. and Senturia, S.D., Macro Power from Micro Machinery, Science, 1997;276:1211.
2. Epstein, A.H., Millimeter-scale, MEMS, Gas Turbine Engines, Proceedings of ASME Turbo Expo 2003, Atlanta Georgia, USA, 2003; pp. 1–28.
3. Miki, N., Zhang, X., Khanna, R., Ayon, A.A., Ward, D., and Spearing, S.M., Multi-stack Silicon-Direct Wafer Bonding for 3D MEMS Manufacturing, Sensors and Actuators A, 2003;103:194–201.
4. Mehra, A., Ayón, A.A., Waitz, I.A., and Schmidt, MA., Microfabrication of High-Temperature Silicon Devices Using Wafer Bonding and Deep Reactive Ion Etching, J. Microelectromech. Syst., 1999;8(2):152–160.
5. Madou, M.J., Fundamentals of MICROFABRICATION the Science of Miniaturization, 2nd ed., CRC Press LLC, USA, 2002.
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