Grazing incidence systems with multiple reflections

Author:

Kozhevnikov I. V.

Publisher

Springer Science and Business Media LLC

Subject

Engineering (miscellaneous),Atomic and Molecular Physics, and Optics

Reference34 articles.

1. A. V. Vinogradov and I. V. Kozhevnikov, “Multilayer x-ray mirrors,” in:X-Ray Optics, Proceedings of the Lebedev Physical Institute,196, Nauka, Moscow (1989), p. 62 [English translation:J. Russ. Laser Res.,16, 343 (1995)].

2. K. A. Valiev and A. V. Rakov,Physical Basics of Electron, Ion, and X-Ray Lithography [in Russian], Radio, Moscow (1984), p. 352.

3. K. A. Valiev,Microelectronics: Advances and Lines of Development [in Russian], Nauka, Moscow (1986), p. 144.

4. J. S. Pearlman and R. F. Benjamin, “Sub-keV x-ray imaging using a low-cost ellipsoidal lens,”Appl. Opt.,16, 94 (1977).

5. A. V. Vinogradov, N. N. Zorev and I. V. Kozhevnikov, “On ultimate possibilities of soft x-ray region optics,” in:Classical and Quantum Effects in Electrodynamics, Proceedings of the Lebedev Physical Institute,176, Nauka, Moscow (1986), p. 195.

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1. Experimental study of the whispering gallery effect in soft X-ray spectral range;Optics Communications;1998-10

2. Determination of the roughness of concave laser mirrors;Quantum Electronics;1997-09-30

3. Vertical synchrotron radiation beamline for proximity X-ray lithography: Theoretical analysis;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1997-08

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