Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry
Reference12 articles.
1. R. Deutsch, U. Erz, H. Herold, and E. RäuchleEurophys. Conf. Abstr. 12H, 363 (1988).
2. K. Köhler, D. E. Horne, and J. W. Coburn,J. Appl. Phys. 58, 3350 (1985).
3. V. A. Godyak and A. A. Kuzovnikov,Sov. J. Plasma Phys. 1, 276 (1975).
4. R. J. Seeböck, R. Deutsch, and E. Räuchle,J. Vac Sci. Technol. A 11, 682 (1993).
5. L. Tonks and J. Langmuir,Phys. Rev. 33, 1070 (1929);34, 876 (1929).