1. R. Behrisch (ed.):Sputtering by Particle Bombardment. Vol. 1:Physical Sputtering of Single-Element Solids (1981). Vol. 2:Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography (1983). Vol. 3:Distribution of Sputtered Particles, Applications (1989) (Topics Appl. Phys. Springer Berlin, Heidelberg)
2. H. Oechsner (ed.):Thin Film and Depth Profile Analyis. Vol. 37 Topics Curr. Phys. (Springer, Berlin, Heidelberg 1984)
3. H. Gnaser, J. Fleischhauer, W.O. Hofer: Appl. Phys. A37, 211 (1985)
4. K.-J. Tschersich et al.: To be published
5. W.O. Hofer: Thin Solid Films29, 223 (1975)