Ion-implantation doping of crystalline 6H-SiC-Reference-Cited by-同舟云学术

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Ion-implantation doping of crystalline 6H-SiC

Published:1995-10 Issue:4 Volume:61 Page:363-367
ISSN:0947-8396
Container-title:Applied Physics A Materials Science & Processing
language:en
Short-container-title:Appl. Phys. A

Author:

Sonntag H.,Kalbitzer S.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/BF01540109.pdf

Reference21 articles.

1. R.T. Davies, J.T. Glass: Adv. Solid State Chem.2, 1 (1991)

2. G. Pensl, R. Helbig: Adv. Solid State Phys.30, 133 (1990)

3. J.A. Powell, P.G. Neudeck, L.G. Matus, J.B. Petit: Mater. Res. Soc. Symp. Proc.242, 495 (1990)

4. CREE Research Inc., Durham, NC 27713, USA

5. G. Krötz, W. Hellmich, G. Müller, G. Derst, S. Kalbitzer: Nucl. Instrum. Methods B80/81, 927 (1993)

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