PLASMA DENSITY MEASUREMENTS OF CONFINED CAPACITIVELY COUPLED PLASMA BY MICROWAVE INTERFEROMETER AND ION ENERGY DISTRIBUTION FUNCTION METHODS-Reference-Cited by-同舟云学术

PLASMA DENSITY MEASUREMENTS OF CONFINED CAPACITIVELY COUPLED PLASMA BY MICROWAVE INTERFEROMETER AND ION ENERGY DISTRIBUTION FUNCTION METHODS

Published:2007-05-08 Issue:11 Volume:27 Page:1497-1515
ISSN:0195-9271
Container-title:International Journal of Infrared and Millimeter Waves
language:en
Short-container-title:Int J Infrared Milli Waves

Author:

Helhel S.,Ellingboe A. R.,Cerezci O.,Gaman C.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation,Radiation

Link

http://link.springer.com/content/pdf/10.1007/s10762-006-9149-9.pdf

Reference24 articles.

1. B. Chapman, Glow Discharge Processes, Wiley, New York, 1980.

2. Deborah O’Connell, Investigations of high voltage plasma boundary sheaths in radio-frequency discharges operated with multiple frequencies, Ph.D. Thesis, Dublin City University, School of Physics, page 40–75, 2004.

3. Kawamura E, Vahedi V, Lieberman MA, Birdsall CK, Plasma Sources Science and Technology, Volume 8(3), page: R45–R64 August 1999.

4. R. B. Piejak, V. A. Godyak, R. Garner, and B. M. Alexandrovich, The hairpin resonator: A plasma density measuring technique revisited, Journal of Applied Physics Volume 95, Number 7, pp:3785–3892, April 2004.

5. Mounir Laroussi, Relationship Between the Number Density and the Phase shift in Microwave Interferometry for Atmospheric Pressure Plasmas, Int. Journal of Infrared and Millimeter Waves, Vol.20, No8, page: 1501–1508, 1999.

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