Design and fabrication of a combined MEMS actuator and grating
Author:
Funder
ministry of electronics & information technology,government of india
department of science and technology, governement of india
Publisher
Springer Science and Business Media LLC
Subject
General Medicine
Link
https://link.springer.com/content/pdf/10.1007/s41683-021-00080-7.pdf
Reference29 articles.
1. Ataman C, Urey H, Wolter A (2006) A Fourier transform spectrometer using resonant vertical comb actuators. J Micromech Microeng 16(12):2517–2523. https://doi.org/10.1088/0960-1317/16/12/001
2. Bakke T, Sagberg H, Grepstad JO, Lacolle M, Herbjornrod AK, Jensen GU et al (2009) Optical MEMS filter for gas spectroscopy. IEEE/LEOS Int Conf Opt MEMS Nanophoton. https://doi.org/10.1109/OMEMS.2009.5338595
3. Barillaro G, Molfese A, Nannini A, Pieri F (2005) Analysis, simulation and relative performances of two kinds of serpentine springs. J Micromech Microeng 15(4):736–746. https://doi.org/10.1088/0960-1317/15/4/010
4. Elshurafa AM, Khirallah K, Tawfik HH, Emira A, Abdel Aziz AKS, Sedky SM (2011) Nonlinear dynamics of spring softening and hardening in folded-MEMS comb drive resonators. J Microelectromech Syst 20(4):943–958. https://doi.org/10.1109/JMEMS.2011.2148162
5. Ghayesh MH, Farokhi H, Amabili M (2013) Nonlinear behaviour of electrically actuated MEMS resonators. Int J Eng Sci 71:137–155. https://doi.org/10.1016/j.ijengsci.2013.05.006
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3