Design and fabrication process development of MEMS quadrupole mass filter for space applications
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Medicine
Link
https://link.springer.com/content/pdf/10.1007/s41683-023-00112-4.pdf
Reference20 articles.
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2. Arevalo R, Ni Z, Danell RM (2019) Mass spectrometry and planetary exploration: a brief review and future projection. J Mass Spectrom 55:1–17. https://doi.org/10.1002/jms.4454
3. Bhardwaj A, Thampi SV, Das TP, Supriya G et al (2016) On the evening time exosphere of Mars: result from MENCA aboard Mars orbiter mission. Geophys Res Lett 43:1862–1867. https://doi.org/10.1002/2016GL067707
4. Boumsellek S, Ferran RJ (2001) Trades-offs in miniature quadrupole designs. J Am Soc Mass Spectrom 12:633–640. https://doi.org/10.1016/S1044-0305(01)00248-3
5. Campana JE (1980) Elemental theory of quadrupole mass filter. Int J Mass Spectr Its Appl 33:101–117. https://doi.org/10.1016/0020-7381(80)80042-8
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1. Simulation study of a planar quadrupole mass filter for MEMS mass spectrometer;Chinese Journal of Analytical Chemistry;2024-02
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