Lens optics brilliant forever-Reference-Cited by-同舟云学术

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Lens optics brilliant forever

Published:2014-11 Issue:6 Volume:21 Page:839-848
ISSN:1340-6000
Container-title:Optical Review
language:en
Short-container-title:OPT REV

Author:

Shibuya Masato

Publisher

Springer Science and Business Media LLC

Subject

Atomic and Molecular Physics, and Optics

Link

http://link.springer.com/content/pdf/10.1007/s10043-014-0137-3.pdf

Reference19 articles.

1. Z. Wakimoto: Japan Patent Showa 42-60854 (1967); Kokoku Showa 45-39875 (1970).

2. S. Hase, M. Shibuya, K. Maehara, M. Oka, and S. Nakadate: Kogaku 40 (2011) 499 [in Japanese].

3. S. Hase, M. Shibuya, K. Maehara, M. Oka, and S. Nakadate: Proc. SPIE 8167 (2011) 81670Y.

4. M. Oka, M. Shibuya, K. Maehara, S. Hase, and S. Nakadate: Kogaku 40 (2011) 36 [in Japanese].

5. G. W. Forbes: Opt. Express 15 (2007) 5218.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Theoretical study for aerial image intensity in resist in high numerical aperture projection optics and experimental verification with one-dimensional patterns;Journal of Micro/Nanolithography, MEMS, and MOEMS;2016-03-04

2. Comparing the experimental resist image with aerial image intensity in high-NA projection lense;SPIE Proceedings;2015-03-18

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