Author:
Han Sol,Kim Hong Jin,Hong Myung Ki,Kwon Byoung Ho,Lee Kuntack,Ko Youngsun
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Reference23 articles.
1. J. M. Steigerwald, S. P. Muraka, and R. J. Gutmann, Chemical Mechanical Planarization of Microelectronic Materials, p. 1, John Wiley & Sons Inc., New York, USA (1997).
2. M. R. Oliver (Ed.), Chemical-Mechanical Planarization of Semiconductor Materials, p. 7, Springer, Berlin Heidelberg, Germany (2004).
3. Y. Li (Ed.), Microelectronic Applications of Chemical Mechanical Planarization, p. 1, John Wiley & Sons Inc., New Jersey, USA (2008).
4. H. Liang, Tribo. Int. 38 235 (2005).
5. J. Van Olmen, J. Coenen, W. Dehaene, K. De Meyer, C. Huyghebaert, A. Jourdain, Guruprasad Katti, A. Mercha, M. Rakowski, M. Stucchi, Y. Travaly, E. Beyne, and B. Swinnen, IEEE Int. Conf. on 3D Sys. Integr. p. 1, IEEE, San Francisco, CA, USA (2009).
Cited by
18 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献