Advanced Thick Film Techniques for Multilayer Structures and Sensors

Author:

Leppävuori S. I.,Uusimäki A. K.

Publisher

Springer Netherlands

Reference11 articles.

1. Moilanen, H., Leppävuori, S. and Uusimäki, A. (1993) Fabrication of Piezoelectric Thick Film Low Voltage Multilayer Actuators Using a New Double Paste Printing Technique, Sensors and Actuators A, 37-38, 106-111.

2. Moilanen, H. and Leppävuori, S. (1995) A screen printed multilayer PZT actuator with an integrated force sensor, Microelectronics International, No. 37, May 1995, 28–30.

3. Leppävuori, S., Väänänen, J., Lahti, M., Remes, J. and Uusimäki, A. (1994) A novel thickfilm technique, gravure offset printing, for the realisation of fine-line sensor structures, Sensors and Actuators A 41-42, 593-596.

4. Leppävuori, S., Lahti, M. Väänänen, J., Kukkola, K. and Leppänen, T. (1994) Preparation of small vias in multilayer thick film structures by gravure offset printing of diffusion patterning paste, IMC 1994 Proceedings, April 20-22,1994, Omiya, Japan, pp. 476-480.

5. Moilanen, H., Leppävuori, S., Uusimaki, A. (1992) Fabrication of an adjustable Fabry-Perot interference filter using piezoelectric thick film low voltage multilayer actuators, Proceedings of 3rd International Conference on New Actuators, June 24-26, 1992, Bremen, Germany, pp. 196-199.

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