Author:
Kitamura Takayuki,Shibutani Tadahiro,Ueno Takashi
Reference8 articles.
1. A. Kinbara, E. Kusano, T. Kamiya, I. Kondo and O. Takenaka, Thin Solid Films, Vol. 317, pp. 165–168, 1998.
2. M. T. Laugier, Thin Solid Films, Vol. 117, pp.243–249, 1984.
3. J. Salem and F. Seqeda, J. Vac. Sci. Technol., Vol. 18, No.2, pp l49–152, 1981.
4. A. J. Kinloch, C. C. Lau and J. G. Williams, Int. J. Fracture, Vol.66, pp.45–70, 1994.
5. Q. Ma, H. Fujimoto, P. Flinn, V. Jain, F. Adibi-Rizi, F. Moghadam and R. H. Dauskardt, Materials Reliability in Microelectronics V (MRS Symp. Proc), Vol. 391, pp. 91–96, 1995.