Design of a Poly-SiGe Piezoresistive Pressure Sensor

Author:

González Ruiz Pilar,De Meyer Kristin,Witvrouw Ann

Publisher

Springer Netherlands

Reference22 articles.

1. K. Hoffman, Applying the Wheatston bridge circuit, http://www.hbm.com.pl/pdf/w1569.pdf

2. S.M. Sze, Semiconductor Sensors (Wiley, New York, 1994)

3. C. Pramanik, H. Saha, V. Gangopadhyay, Design optimization for a high performance silicon MEMS piezoresistive pressure sensor for biomedical applications. J. Micromech. Microeng. 16, 2060–2066 (2006)

4. H.-S. Hsieh, H.-C. Chang, C.-F. Hu, C.-P. Hsu, W. Fang, Method for sensitivity improvement and optimal design of a piezoresistive pressure sensor, in Proceedings of the 9th IEEE Sensors Conference, pp. 1799–1802, 2010

5. K.N. Bhat, Silicon micromachined pressure sensors. J Indian Inst. Sci. 87(1), 115–131 (2007)

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