1. M.Esashi, Integrated micro flow control systems, Sensors& Actuators, A21-A23, (1990), 161–167
2. S.Nakagawa, S.Shoji and M.Esashi, A micro chemical analyzing systemintegrated on a silicon wafer,Proc. of IEEE-MEMS Workshop, (1990-2), 89–94
3. M.J.Zdeblick, R.Anderson, J.Jankowski, B.Kline-Schoder, L.Christel, R.Miles andW.Weber, Thermpneumatically actuated microvalves and integrated electro-fluidiccircuits, Tech. Digest of IEEE Solid-State Sensors and Actuator Workshop, (1994-6),251–255
4. S.Shoji, M.Esashi,, Micromachining for chemical sensors, Chemical SensorTechnology, 1, (1988), 179–193
5. H.T.G.van Lintel,, F.C.M.van de Pol and S.Bouwstra, A piezoelectric micropump based onmicromaching ofsilicon, Sensors & Actuators, 15, (1988), 153–167