Technology and Application of Filamentless RF — Ion Sources in Ion Beam Sputter Deposition
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Published:1993
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Page:21-38
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ISSN:
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Container-title:Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
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language:
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Publisher
Springer Netherlands
Reference35 articles.
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5. J.M.E. Harper, J.J. Cuomo and H.R. Kaufman, J. Vac. Sci. Technol. 21 (1982) 737.