Integrated Micro-acoustic Devices
Author:
Publisher
Springer Netherlands
Link
http://link.springer.com/content/pdf/10.1007/978-94-017-9780-1_199
Reference40 articles.
1. Jin, X.C., Ladabaum, I., Khuri-Yakub, B.T.: The microfabrication of capacitive ultrasonic transducers. J. Microelectromech. Syst. 7(3), 295–302 (1998)
2. Jin, X.C., Ladabaum, I., Degertekin, F.L., Calmes, S., Khuri-Yakub, B.T.: Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers. J. Microelectromech. Syst. 8(1), 100–114 (1999)
3. Knight, J., McLean, J., Degertekin, F.L.: Low temperature fabrication of immersion capacitive micromachined ultrasonic transducers on silicon and dielectric substrates. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 51(10), 1324–1333 (2004)
4. Ding, W.: MEMS Microphone. Market & Technology Report, Yole Développement (2011)
5. Haller, M.I., Khuri-Yakub, B.T.: A surface micromachined electrostatic ultrasonic air transducer. In: Proceedings of the IEEE Ultrasonics Symposium, Cannes, vol. 2, pp. 1241–1244 (1994)
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