Lamé Mode MEMS Resonators

Author:

Lee Joshua E-Y

Publisher

Springer Netherlands

Reference21 articles.

1. Basrour, S., Majjad, H., Coudevylle, J.R., de Labachelerie, M.: Simulation and characterization of high Q microresonators fabricated by UV-LIGA. In: Proceedings of the 4th International Conference on Modeling and Simulation of Microsystems, Hilton Head Island, 19–21 Mar 2001

2. Ekstein, H.: Free vibrations of anisotropic bodies. Phys. Rev. 66(5–6), 108–118 (1944)

3. Lee, J.E.-Y., Seshia, A.A.: Parasitic feedthrough cancellation techniques for enhanced electrical characterization of electrostatic microresonators. Sensors Actuator A Phys. 156(1), 36–42 (2009)

4. Xu, Y., Lee, J.E-Y.: Differential-input piezoresistively-sensed square-extensional mode resonator for parasitic feedthrough cancellation. In: Proceedings of the 16th International Conference on Solid-state Sensors, Actuators and Microsystems, Beijing, 5–9 June 2011

5. Bhave, S.A., Gao, D., Maboudian, R., Howe, R.T.: Fully-differential poly-SiC Lamé-mode resonator and checkerboard filter. In: Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, Miami, 30 Jan–3 Feb 2005

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1. Mathematical Model for Determining of Amplitude-Frequency Characteristics MEMS-Resonator;2022 IEEE XVIII International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH);2022-09-07

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