Electrostatic MEMS Microphones

Author:

Hall Neal A.

Publisher

Springer Netherlands

Reference16 articles.

1. Loeppert, P.V., Lee, S.B.: SiSonicTM – the first commercialized MEMS microphone. Presented at the Solid-state sensors, actuators, and microsystems workshop, Hilton Head Island (2006)

2. Tekedia.com: MEMS microphones break the billion unit barrier. http://tekedia.com/34372/mems-microphones-break-billion-unit-barrier / (2012, January). Accessed 1 Feb 2012

3. Lowensohn, J.: Apple bests Samsung as buyer of tiny mics. http://news.cnet.com/8301-13579_3-57362174-37/apple-bests-samsung-as-buyer-of-tiny-mics/ (2012, January 19). Accessed 1 Feb 2012

4. De Bree, H.-E., Leussink, P., Korthorst, T., Jansen, H., Lammerink, T.S.J., Elwenspoek, M.: The μ-flown: a novel device for measuring acoustic flows. Sens. Actuators A Phys. 54, 552–557 (1996)

5. Fuldner, M., Dehe, A.: Challenges of high SNR (signal to noise) silicon micromachined microphones. Presented at the 19th international congress on acoustics, Madrid (2007)

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