1. Handbook of Thin Film Technology, L. I. Maissel and R. Glang, Eds., McGraw Hill, New York (1970).
2. Thin Film Processes, J. L. Vossen and W. Kern, Eds., Academic Press, New York (1978).
3. R. F. Bunshah, Deposition Technologies for Films and Coatings: Developments and
Applications, Noyes, Park Ridge, New Jersey (1982).
4. S. K. Ghandhi, VLSI Fabrication Principles, John Wiley & Sons, New York (1983).
5. D. S. Campbell, Handbook of Thin Film Technology, L. I. Maissel and R. Glang, Eds., McGraw Hill, New York (1970), Chapt. 5.