Curved Beams
Publisher
Springer Netherlands
Cited by
2 articles.
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1. Modeling Stress Effects on Frequencies of a Mems Ring Gyroscope;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
2. Fabrication and characterization of double curvature bendable silicon wafers;Journal of Micromechanics and Microengineering;2018-09-04