Author:
Werner Z.,Piekoszewski J.,Grötzschel R.,Szymczyk W.
Reference5 articles.
1. Brown LG., Liu F., Monteiro O.R., Yu K.M., Evans P.J., Dytlewski N., Oztarhan A., Corcoran S.G., Crowson D. (1998) Surf.&Coat. Techn. 103–104, 293-298
2. Yu L.D., Vilaithong T., Yotsombat B., Thongtem S., Han J.G., Lee J.S. (1998) Surf.&Coat Techn. 103–104,328-333
3. Bugaev S.P, Nikolaev A.G., Oks E.M., Schanin P.M., Yushkov G.Yu., Rev Sei Instr (1992)63,2422
4. TITAN Ion Source Manual, HCEI Tomsk, Russia
5. P. Sigmund in Topics in Applied Physics, Vol 47 Sputtering by Particle Bombardment I, R. Behrish (ed) Springer Verlag, Berlin, Heidelberg, New York, 1981