Optimization of MOVPE Growth for InGaAs on (001)Si

Author:

Wehmann H.-H.,Tang G.-P.,Iber H.,Mo S.,Schlachetzki A.,Malacky L.

Publisher

Springer Netherlands

Reference7 articles.

1. Rein, H.-M. (1995) Very-high-speed Si and SiGe bipolar ICs, in de Graaff, H.C., van Kraneneburg, H. (eds.) ESSDERC’95, Editions Frontieres, Gif sur Yvette Cedex, France, 45 – 56.

2. Lubnow, A., Tang, G.-P., Wehmann, H.-H., and Schlachetzki, A. (1994) The effect of III/V-compound epitaxy on Si-metal-oxide-semiconductor circuits, Japan. J. Appl. Phys. 33, 3628 – 3634.

3. Tang, G.-P., Lubnow, A., Wehmann, H.-H., Zwinge, G., and Schlachetzki A. (1992) Antiphase-domain-free InP on (100) Si, Japan. J. Appl. Phys. 31, L1126-L1128.

4. Wehmann, H.-H., Tang, G.-P., Koch, A., Seibt, M., and Schlachetzki, A. (1995) Twin formation during epitaxial growth of InP on Si, Solid State Phenomena 47–48, 547 – 552.

5. Zwinge, G., Wehmann, H.-H., Schlachetzki, A., and Hsu, C.C. (1993) Orientation-dependent growth of InGaAs/InP for applications in laser-diode arrays, J. Appl. Phys. 74, 5516 – 5519.

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