A Combined Semi-analytical and Experimental Approach for Multiphysical Nonlinear MEMS Resonators

Author:

Mestrom R. M. C.,Fey Rob H. B.,Phan K. L.,Nijmeijer H.

Publisher

Springer Netherlands

Reference21 articles.

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2. Doedel, E., Champneys, A.R., Fairgrieve, T.F., Kuznetsov, Y.A., Sandstede, B., Wang, X.: AUTO97: Continuation and Bifurcation Software for Ordinary Differential Equations (with HomCont), Technical Report, Concordia University (1998)

3. Han, S.M., Benaroya, H., Wei, T.: Dynamics of transversely vibrating beams using four engineering theories. J. Sound Vib. 225(5), 935–988 (1999)

4. Hao, Z., Xu, Y.: Vibration displacement on substrate due to time-harmonic stress sources from a micromechanical resonator. J. Sound Vib. 322(1–2), 196–215 (2009)

5. Kaajakari, V., Mattila, T., Oja, A., Seppä, H.: Nonlinear limits for single-crystal silicon microresonators. J. Microelectromech. Syst. 13(5), 715–724 (2004)

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