A new algorithm for layer thickness and index step estimation in multi-layer hetero-epitaxial structures-Reference-Cited by-同舟云学术

A new algorithm for layer thickness and index step estimation in multi-layer hetero-epitaxial structures

Published:1990-12 Issue:12 Volume:19 Page:1383-1394
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:JEM

Author:

Swart Pieter L.,Lacquet Beatrys M.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02662828.pdf

Reference19 articles.

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2. W. G. Spitzer and M. Tannenbaum, J. Appl. Phys.32, 744 (1961).

3. B. M. Lacquet and P. L. Swart, S.A.J. Sci.84, 667 (1988).

4. B. M. Lacquet, Optical Modelling and Characterization of Silicon-on-Insulator layers and Related Structures, D. Ing-thesis, RAU, Johannesburg. Jan. 1988.

5. P. L. Swart and B. M. Lacquet, Conf. Record of the 1989 IEEE SOS/SOI Tech. Conf., Stateline, Nevada, 158 (1989).

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