Publisher
Springer International Publishing
Reference63 articles.
1. S. Franssila, Introduction to Microfabrication, 2nd edn. (John Wiley & Sons, 2010)
2. C.A. Mirkin, S.H. Hong, L. Demers, Chem. Phys. Chem. 2, 37 (2001)
3. J.P.H. Benschop, A.J.J. Van Dijsseldonk, W.M. Kaiser, D.C. Ockwell, Solid State Technol. 42, 43 (1999)
4. J.G. Chase, B.W. Smith, J. Intell. Mater. Syst. Struct. 12, 807 (2001)
5. F. Cerrina, J. Phys. D (Appl. Phys.) 33, R103 (2000)