Author:
Groepper Charles,Li Perry Y.,Cui Tianhong,Stelson Kim A.
Publisher
Springer International Publishing
Reference44 articles.
1. Bistue G, Elizalde JG, Garcia-Alonso I, Olaizola S, Castano E, Gracia FJ, Garcia-Alonso A (1997) A micromachined pressure sensor for biomedical applications. J Micromech Microeng 7:244–246
2. Boillat M, Van Der Schoot B, Droz B (2000) A high-precision piezoresistive flow sensor for microdosing applications. Sensors 17(9)
3. Chevroulet M (2000) A pressure sensor for a smart barometer. Sensors 17(5)
4. Eaton W, Smith J (1997) Micromachined pressure sensors: review and recent developments. Smart Mater Struct 6:530–539
5. Fung C, Harris R, Zhu T (1999) Multifunction polysilicon pressure sensors for process control. Sensors 16(10)