Kinetics of Charge Carrier Confinement in Thin Dielectrics
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-43220-5_6
Reference27 articles.
1. Atkin, J. M., Shaw, T. M., Liniger, E., Laibowitz, R. B., & Heinz, T. F. (2012, April). The effect of voltage bias stress on temperature-dependent conduction properties of low-κ dielectrics. In 2012 I.E. International Reliability Physics Symposium (IRPS) (pp. BD.1.1–BD.1.6). Piscataway, NJ: IEEE.
2. Book, G. W., Pfeifer, K., & Smith, S. (2002). Barrier integrity testing of Ta using triangular voltage sweep and a novel CV-BTS test structure. Microelectronic Engineering, 64(1), 255–260.
3. Borja, J., Plawsky, J. L., Lu, T. M., Bakhru, H., & Gill, W. N. (2014a). Current leakage relaxation and charge trapping in ultra-porous low-κ materials. Journal of Applied Physics, 115(8), 084107–084107.6.
4. Borja, J., Plawsky, J. L., Lu, T. M., Gill, W. N., Shaw, T. M., Laibowitz, R. B., … Bonilla, G. (2014b). Detection of charge carrier confinement into mobile ionic defects in nanoporous dielectric films for advanced interconnects. Journal of Vacuum Science & Technology A, 32(5), 051508.
5. Borja, J., Plawsky, J. L., Lu, T. M., & Gill, W. N. (2013). On the dynamics of Cu ions injection into low-κ nanoporous materials under oscillating applied fields. Journal of Applied Physics, 113(3), 034104–034104.7.
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