1. M.J. Deen: Proc. 6th Symp. Silicon Nitride Silicon Dioxide Thin Insulating Films, ed. by R.E. Sah, M.J. Deen, D. Landheer, K.B. Sundaram, W.D. Brown, D. Misra (Electrochem. Soc. Paris, Paris 2003) p. 3
2. P. Rai-Choudhury, J. Benton, D. Schroder (Eds.): Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices, Vol. 97-12 (The Electrochemical Society Press, New Jersey 1997)
3. D. Schroder: Semiconductor Material and Device Characterization, 2nd edn. (Wiley, New York 1998)
4. W. Runyan, T. Shaffner: Semiconductor Measurements and Instrumentation, 2nd edn. (McGraw Hill, New York 1997)
5. ITRS: International Technology Roadmap for Semiconductors 2001 version, http://public.itrs.net/Files/2001ITRS/Home.htm (2001)