A Generic Approach for Analysis of White-Light Interferometry Data via User-Defined Algorithms

Author:

Schneider Max,Fey Dietmar,Wenzel Kay,Machleidt Torsten

Publisher

Springer International Publishing

Reference22 articles.

1. Michelson, A.A.: On the application of interference methods to astronomical measurements. Philosophical Magazine Series 5 30(182), 1–21 (1890)

2. Leach, R.: Optical Measurement of Surface Topography. Springer (2011)

3. Shilling, K.M.: Mesoscale Edge Characterization. Dissertation, Mechanical Engineering. Georgia Institute of Technology (March 2006)

4. Larkin, K.G.: Topics in Multi-dimensional Signal Demodulation. PhD thesis, The Faculty of Science in the University of Sydney (2000)

5. Kapusi, D., Machleidt, T., Franke, K.H., Jahn, R.: White light interferometry in combination with a nanopositioning and nanomeasuring machine (NPMM), vol. 6616, pp. 661607-1–661607-10 (2007)

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