Silicon-on-Insulator Waveguides
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-01550-7_6
Reference29 articles.
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5. Chen GS (2012) Chapter 8 Ion implantation. http://www.me.ntut.edu.tw/introduction/teacher/lu/IC%20fabrication_GA/IC_ch08.pdf . Accessed 21 Feb 2013
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