Porous Silicon Formation by HNO3/HF Vapor Etching
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-05744-6_7
Reference30 articles.
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3. Aouida S, Saadoun M, Ben Saad K, Bessais B (2006) Phase transition and luminescence properties from vapor etched silicon. Thin Solid Films 495:357
4. Ben Jaballah A, Saadoun M, Hajji M, Ezzaouia H, Bessais B (2004) Silicon dissolution regimes from chemical vapor etching: from porous structures to silicon grooving. Appl Surf Sci 238:199
5. Ben Jaballah A, Hassen M, Hajji M, Saadoun M, Bessais B, Ezzaouia H (2005) Chemical vapour etching of silicon and porous silicon: Silicon solar cells and micromachining applications. Phys Stat Sol (a) 202(8):1606
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