1. Brouillette, M., Mirshekari, G.: Piezoelectric sensors and sensor arrays for the measurement of wave amplitude, speed and direction in a fluid, and method of manufacturing therefor, U.S. Patent Application No. 61/521,022 (filed Aug. 8, 2011), PCT Application No. PCT/CA2012/000736 (filed Aug. 6, 2012) (2011)
2. Mirshekari, G., Brouillette, M.: Microscale shock tube. IEEE J. MEMS 21(3), 739–748 (2012)
3. Zakar, E., Polcawich, R., Dubey, M., Pulskamp, J., Piekarski, B., Conrad, J., Piekarz, R.: Stress analysis of SiO2/Ta/Pt/PZT/Pt stack for MEMS application. In: Proceedings of the 12th IEEE International Symposium on Applications of Ferroelectrics, Honolulu, HI, pp. 757–759 (2000)
4. Pandeya, S.K., Jamesa, A.R., Prakasha, C., Goelb, T.C., Zimik, K.: Electrical properties of PZT thin films grown by sol-gel and PLD using a seed layer. Mat. Science & Engineering B 112, 96–100 (2004)
5. Mirshekari, G., Brouillette, M., Fréchette, L.: Through-silicon vias integrable with thin-film piezoelectric structures. Int. J. Nanoscience 11(4), 1240015 (2012)