Irradiation Damage Test of Mo/Si, Ru/Si and Nb/Si Multilayers Using the Soft X-Ray Laser Built at QST

Author:

Ichimaru S.,Ishino M.,Nishikino M.,Hatayama M.,Hasegawa N.,Kawachi T.,Maruyama T.,Inokuma K.,Zenba M.,Oku S.

Publisher

Springer International Publishing

Reference17 articles.

1. Attwood, D.: Soft X-ray and Extreme Ultraviolet Radiation. Cambridge University Press (1999)

2. Kato, E., et al.: Development of superconducting accelerator with ERL for EUV-FEL. In: 2014 International Workshop on EUV and Soft X-Ray Sources, Dublin, Ireland, Nov 2014

3. RIKEN topics: http://www.riken.jp/pr/topics/2016/20160722_2/

4. Gigaphoton Inc.: News release, http://www.gigaphoton.com/en/news/4657

5. Khorsand, A.R., et al.: Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure. Opt. Express 18(2), 700 (2010)

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