Publisher
Springer International Publishing
Reference47 articles.
1. The use of degassing loops originates from the thin film community but the historical origin of this useful method is not known
2. Professor R.J. Behm (personal communication)
3. W.F. Leonard, Rev. Sci. Instrum. 40, 187 (1969)
4. D.A. Steigerwald, W.F. Egelhoff Jr, J. Vac. Sci. Technol. A7, 3123 (1989)
5. K.J. Ross, B. Sonntag, Rev. Sci. Instrum. 66, 4409 (1995)