Shear Piezoelectric MEMS Resonators-Reference-Cited by-同舟云学术

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Shear Piezoelectric MEMS Resonators

Published:2017 Issue: Volume: Page:221-242
ISSN:2198-0063
Container-title:Microsystems and Nanosystems
language:
Short-container-title:

Author:

Chang D. T.,Kirby D. J.

Publisher

Springer International Publishing

Link

http://link.springer.com/content/pdf/10.1007/978-3-319-28688-4_9

Reference20 articles.

1. Demirci MU, Nguyen CT-C (2003) Higher-mode free-free beam micromechanical resonators. In: IEEE international frequency control symposium proceedings, pp 810–818

2. Rinaldi M, Zuniga C, Piazza G (2009) Ultra-thin-film AlN contour-mode resonators for sensing applications. In: IEEE international ultrasonics symposium proceedings, pp 714–717

3. Wang R, Bhave SA (2012) Thin-film lithium niobate contour-mode resonator. In: IEEE international ultrasonics symposium proceedings, pp 303–306

4. Kirby DJ et al (2013) Optimizing UHF quartz MEMS resonators for high thermal stability. In:~Joint UFFC, EFTF and PFM symposium proceedings, pp 699–702

5. Kubena RL et al (2013) UHF quartz MEMS oscillators for dynamics-based system enhancements. In: Joint UFFC, EFTF and PFM symposium proceedings, pp 1–8

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Micromachined piezoelectric Lamb wave resonators: a review;Journal of Micromechanics and Microengineering;2023-09-22

2. NEMS Sensors Based on Novel Nanomaterials;Advanced MEMS/NEMS Fabrication and Sensors;2021-10-13

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