Quality Factor and Coupling in Piezoelectric MEMS Resonators
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-28688-4_5
Reference90 articles.
1. Brand O, Heinrich S, Hierold C, Korvink JG, Dufour I, Fedder GK, Tabata O, Josse F (2015) Resonant MEMS. Wiley, New York, NY
2. Bahreyni B (2008) Fabrication & design of resonant microdevices. William Andrew, New York, NY
3. Djurić Z (2000) Mechanisms of noise sources in microelectromechanical systems. Microelectron Reliabil 40(6):919–932
4. Callen HB, Welton TA (1951) Irreversibility and generalized noise. Phys Rev 83(1):34
5. Vig JR, Yoonkee K (1999) Noise in microelectromechanical system resonators. IEEE Trans Ultrason Ferroelectr Freq Control 46(6):1558–1565
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Micromachined piezoelectric Lamb wave resonators: a review;Journal of Micromechanics and Microengineering;2023-09-22
2. Thermoelastic damping in MEMS gyroscopes at high frequencies;Microsystems & Nanoengineering;2023-01-16
3. Magnetometer based on a quartz MEMS resonator with two DETFs and a stack of magnetic materials;2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2022-05-08
4. GHz AlN-based multiple mode SAW temperature sensor fabricated on PEN substrate;Sensors and Actuators A: Physical;2020-11
5. A Microfluidic MEMS-Microbalance Platform With Minimized Acoustic Radiation in Liquid;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2020-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3