Micro-scale Geometry Measurement

Author:

Piano Samanta,Su Rong,Leach Richard

Publisher

Springer International Publishing

Reference120 articles.

1. Tosello G, Hansen HN, Marinello F, Gasparin S (2010) Replication and dimensional quality control of industrial nanoscale surfaces using calibrated AFM measurements and SEM image processing. Ann CIRP 59:563–568

2. Fang FZ, Zhang XD, Weckenmann A, Zhang GX, Evans C (2013) Manufacturing and measurement of freeform optics. Ann CIRP 62:823–846

3. ISO 25178 part 601 (2010) Geometrical product specifications (GPS)—surface texture: Areal–Part 601: Nominal characteristics of contact (stylus) instruments. International Organization for Standardization

4. Leach RK (ed) (2014) Fundamental principles of engineering nanometrology, 2nd edn. Elsevier, Amsterdam

5. Whitehouse DJ (2010) Handbook of surface and nanometrology, 2nd edn. CRC Press, Florida

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