Sensitivity and Response Time Analyses of a Wireless Thermal Convection Non-Floating Type Inclinometer with Hemispherical Chamber Filled by Carbon Dioxide

Author:

Lin Jium-Ming,Lin Cheng-Hung

Publisher

Springer International Publishing

Reference11 articles.

1. Billata, S., Glosch, H., Kunze, M., Hedrich, F., Frech, J., & Auber, J., et al. (2002). Micromachined inclinometer with high sensitivity and very good stability. Sensors and Actuators, A: Physical, 97–98, 125–130.

2. Billat, S., Glosch, H., Kunze, M., Hedrich, F., Frech, J., & Auber, J., et al. (2001). Convection-based micromachined inclinometer using SOI technology. MEMS, 01, 159–161.

3. Baxter, R. R., Ohno, S., Hawley, S. D., & Wilson, D. M. (2003). On a micromachined fluidic inclinometer, transducers. Solid-State Sensors. Actuators and Microsystems, 2, 1279–1282.

4. Leung, A. M., Jones, J., Czyzewska, E., Chen, J., & Woods, B. (1998). Micromachined accelerometer based on convection heat transfer. MEMS, 98, 627–630.

5. Milanovic, V., Bowen, E., Tea, N., Suehle, J., Payne, B., & Zaghloul, M., et al. (1998). Convection based accelerometer and tilt sensor implemented in standard CMOS. MEMS, 98, 290–487.

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