Author:
Shim Seongbo,Shin Youngsoo
Publisher
Springer International Publishing
Reference9 articles.
1. S. Shim, Y. Shin, Physical design and mask optimization for directed self-assembly lithography (DSAL), in Proceedings of the International Conference on Very Large Scale Integration (VLSI-SoC) (2015), pp. 80–85
2. S. Shim, W. Chung, Y. Shin, Defect probability of directed self-assembly lithography: fast identification and post-placement optimization, in Proceedings of the International Conference on Computer Aided Design (2015), pp. 404–409
3. W. Chung, S. Shim, Y. Shin, Redundant via insertion in directed self-assembly lithography, in Proceedings of the Design, Automation and Test in Europe Conference and Exhibition (2016), pp. 55–60
4. S. Shim, W. Chung, Y. Shin, Placement Optimization for MP-DSAL Compliant Layout, in Proceedings of the International Conference on IC Design and Technology (ICICDT) (2016), pp. 1–4
5. S. Shim, W. Chung, Y. Shin, Redundant via insertion for multiple-patterning directed-self-assembly lithography, in Proceedings of the Design Automation Conf. (2016), pp. 41:1–41:6