Simulation methods of ion sheath dynamics in plasma source ion implantation
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://link.springer.com/content/pdf/10.1007/BF02889743.pdf
Reference62 articles.
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2. Conrad, J. R., Radtke, J. L., Dodd, R. A. et al., Plasma source ion implantation technique for surface modification of materials, J. Appl. Phys., 1987, 62(11): 4591–4596.
3. Walter, K. C., Nitrogen plasma source ion implantation of Aluminum, J. Vac. Sci. Tech. B, 1994, 12(2): 945–950.
4. Walter, K. C., Scheuer, J. T., Mcintyre, P. C. et al., Increased wear resistance of electrodeposited chromium through applications of plasma source ion implantation techniques, Surf. Coat. Tech., 1996, 85(1–2): 1–6.
5. Wang, W., Booske, J. H., Baum, C. et al., Modification of bearing steel surface by nitrogen plasma source ion implantation for corrosion protection, Surf. Coat. Tech., 1999, 111(1): 97–102.
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